A comparison of surface metrology techniques
نویسنده
چکیده
The study of surface metrology is becoming more and more commonplace in industrial and research environments. Because of this expansion there are more and more technologies available for looking at the surface and each has its own applications. Stylus profilometry, white light interferometry and confocal microscopy are common techniques used to measure surface metrology. Strengths and weaknesses of each of the techniques are discussed with examples. The use of scanning probe techniques as metrology tools is also briefly discussed.
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تاریخ انتشار 2005